Aluminum oxynitride dielectric films prepared by reactive sputtering
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Electronics and Communications
سال: 2015
ISSN: 2312-1807,1811-4512
DOI: 10.20535/2312-1807.2015.20.3.53591